机读格式显示(MARC)
- 000 00899nam0 2200277 450
- 100 __ |a 19950728d1979 em y0chiy50 ea
- 200 1_ |a 硅材料质量与硅器件工艺 |A Gui Cai Liao Zhi Liang Yu Gui Qi Jian Gong Yi |9 gui cai liao zhi liang yu gui qi jian gong yi |f 夏锦禄等编
- 210 __ |a 上海 |c 上海科学技术文献出版社 |d 1979
- 606 0_ |a 硅-半导体材料 |A Gui - Ban Dao Ti Cai Liao
- 606 0_ |a 半导体材料-硅 |A Ban Dao Ti Cai Liao - Gui
- 606 0_ |a 硅-半导体工艺 |A Gui - Ban Dao Ti Gong Yi
- 606 0_ |a 半导体工艺-硅 |A Ban Dao Ti Gong Yi - Gui
- 701 _0 |a 夏锦禄 |A Xia Jin Lu |9 xia jin lu deng |4 编
- 801 _0 |a CN |b 91MARC |c 20130904
- 905 __ |a SYXY |d TN342/14